Introduction to microfabrication technologies
Short course
Targeted audience
Technicians, engineers and sales representatives in contact with
cleanroom
Duration
2 days (14 hrs)
Location
Noisy-le-Grand (93)
France
Public rate
2 125 €
Objectives
- Get a basic knowledge of the cleanroom environment and the technical facilities required for its operation
- Identify and implement the main processes for microdevice fabrication
- Be able to use process equipment
- Provide a global vision of technological processes for an effective appropriation of the professional environment
Programme
General introduction to the cleanroom environment
> Specificities of cleanroom environment
> Different classes of cleanrooms
> Gowning procedure, personal protective equipment and safety
> Technical facilities required to maintain the cleanroom environment (with a visit) : air treatment, water treatment, management of liquid and gaseous effluents
Microfabrication technologies in cleanrooms
> Definitions and theory
> Practical work inside the cleanrooms, implementation of the following microfabrication
processes :
. Thin film deposition by sputtering
. Photolithography (single-side and alignment)
. Reactive Ion Etching (RIE)
. Thickness measurements by profilometry
. Dicing
Located on a dynamic campus with high-tech platforms, quick and easy access from Paris center
More than 30 years of experience and innovation for
academic and industrial MEMS field
High ratio of practice (~70%) vs. theory
Up-to-date ISO 5 and ISO 7 cleanrooms on 650
sq-meter, opened in 2017
Coffee-breaks and lunches in a private lounge included